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Method of fabricating lateral power MOSFET having

2020-01-04 来源:步旅网
专利内容由知识产权出版社提供

专利名称:Method of fabricating lateral power

MOSFET having metal strap layer to reducedistributed resistance

发明人:Richard K. Williams,Mohammad Kasem申请号:US09/264602申请日:19990308公开号:US06159841A公开日:20001212

摘要:To reduce the distributed resistance in an integrated circuit die, a relatively thickmetal strap layer is deposited on a bus or other conductive path in the top metal layer.The metal strap layer is formed by etching a longitudinal channel in the passivation layerover the bus and plating a thick metal layer, preferably nickel, in the channel. The metalstrap layer dramatically reduces the resistance of the bus.

申请人:SILICONIX INCORPORATED

代理机构:Skjerven Morrill MacPherson LLP

代理人:David E. Steuber

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