专利名称：METHODS OF FORMING LAYERS发明人：PITCHER, Philip, George申请号：EP13704689.2申请日：20130201公开号：EP2809820A1公开日：20141210
摘要：A method of forming a layer, the method including providing a substrate havingat least one surface adapted for deposition thereon; providing a precursor ion beam, theprecursor ion beam including ions; neutralizing at least a portion of the ions of theprecursor ion beam to form a neutral particle beam, the neutral particle beam includingneutral particles; and directing the neutral particle beam towards the surface of thesubstrate, wherein both the ions and the neutral particles have implant energies of notgreater than 100 eV, and the neutral particles of the particle beam form a layer on thesubstrate.
申请人：Seagate Technology LLC,Pitcher, Philip, George
地址：10200 South De Anza Boulevard Cupertino, CA 95014 US,16263 Stemmer RidgeRoad NW Shakopee, MN 55379 US
国籍：US,US
代理机构：Miller Sturt Kenyon
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