专利名称：Use of specific resistivity measurement for
indirect determination of the purity ofsilanes and germanes and a correspondingprocess
发明人：Ekkehard Mueh,Hartwig Rauleder,Rainer
Amend,Martin Hajduk
申请号：US13580843申请日：20101228公开号：US09618466B2公开日：20170411
专利附图：
摘要：The invention relates to a method for indirectly determining the purity ofsilanes and germanes using a device for measuring specific resistance. The inventionfurther relates to a system for industrially producing and/or filling containers with silanesor germanes, including a quality control in which a device is used for measuring specificresistance.
申请人：Ekkehard Mueh,Hartwig Rauleder,Rainer Amend,Martin Hajduk
地址：Rheinfelden DE,Rheinfelden DE,Otzberg DE,Goldbach DE
国籍：DE,DE,DE,DE
代理机构：Oblon, McClelland, Maier & Neustadt, L.L.P.
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