专利名称：Optical waveguide displacement sensor发明人：Roberto R. Panepucci,Bojan Ilic,Michal
Lipson,Vilson Rosa de Almeida
申请号：US10781339申请日：20040218
公开号：US20050180678A1公开日：20050818
专利附图：
摘要：A substrate incorporates a mechanical cantilever resonator with passiveintegrated optics for motion detection. The resonator acts as a waveguide, and enablesoptical detection of deflection/displacement amplitude, including oscillations. In one
embodiment, the cantilever comprises a silicon waveguide suspended over a substrate. Areflector structure faces a free end of the suspending cantilever, or a waveguide issupported facing the free end of the suspended cantilever to receive light transmittedthrough the silicon waveguide cantilever. Deflection/displacement of the cantileverresults in modulation of the light received from its free end that is representative of thedisplacement. Ring resonators may be used to couple different wavelength light to thewaveguides, allowing formation of an array of cantilevers.
申请人：Roberto R. Panepucci,Bojan Ilic,Michal Lipson,Vilson Rosa de Almeida
地址：Miami FL US,Ithaca NY US,Ithaca NY US,Ithaca NY US
国籍：US,US,US,US
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容