Method of manufacturing an optical core

专利名称：Method of manufacturing an optical core发明人：Hichem M'Saad,Anchuan Wang申请号：US10020461申请日：20011214

公开号：US20030110808A1公开日：20030619

专利附图：

摘要：Embodiments of the present invention provide a highly uniform low costproduction worthy solution for manufacturing low propagation loss optical waveguideson a substrate. The method comprises depositing an optical core using a high-densityplasma deposition process. The method is particularly advantageous in forming high

contrast refractive index optical cores, such as SiON, with drastically reduced propagationloss. In one embodiment the high-density plasma deposition process is an HDP-CVDprocess. In another embodiment the high-density plasma deposition process is an HDP-ECR process. In one embodiment, a method of forming an optical waveguide comprisesforming at least one optical core on an undercladding layer of a substrate using a high-density plasma deposition process.

申请人：APPLIED MATERIALS INC., A DELAWARE CORPORATION

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