Micro thermoelectric device and manufacturing meth

专利名称：Micro thermoelectric device and

manufacturing method thereof

发明人：Chun-Kai Liu,Jen-Hau Cheng申请号：US10902004申请日：20040730

公开号：US20050150538A1公开日：20050714

专利附图：

摘要：The present invention discloses a micro thermoelectric device and

manufacturing method thereof, and the manufacturing method comprises the steps ofproviding a substrate and depositing a barrier layer on the substrate, using the barrier

layer as a mask to etch a pattern on the barrier layer to form a plurality of openings,adopting a reactive ion etching (RIE) method to remove the barrier layer and smoothingthe curvature of the corner of each groove, depositing a metal conductive wire layer,coating an adhesive layer in said each groove by a surface mount technology (SMT),placing a plurality of thermoelectric materials individually into each groove, repeatingsteps (a) to (f) to produce another substrate, and connecting the two substrates into analigned position.

申请人：Chun-Kai Liu,Jen-Hau Cheng

地址：Taipei TW,Taipei TW

国籍：TW,TW

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