专利名称：MICROELECTROMECHANICAL MIRROR
ASSEMBLY
发明人：Shane R. Palmer,Michael Binnard申请号：US14469397申请日：20140826
公开号：US20150055107A1公开日：20150226
专利附图：
摘要：An optical element assembly includes a base, and an element unit. The elementunit includes (i) an optical element having an element central axis and an elementperimeter; and (ii) an element connector assembly that couples the optical element to
the base, the element connector assembly including a flexure assembly having anelement flexure and a base flexure. A distal end of the element flexure is coupled to theoptical element near the element perimeter, a distal end of the base flexure is coupledto the base, and a proximal end of the element flexure is coupled to a proximal end ofthe base flexure near the element central axis.
申请人：NIKON CORPORATION
地址：Tokyo JP
国籍：JP
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