专利名称：Flash memory cells with reduced distances
between cell elements
发明人：Roger W. Lindsay,Frances May,Robert
Veltrop
申请号：US10881042申请日：20040630
公开号：US20060003588A1公开日：20060105
专利附图：
摘要：An anti-reflective coating (ARC) is formed over the various layers involved in acell fabrication process. The ARC is selectively etched such that the edges of the etched
areas of the ARC slope downward at an angle determined by the thickness of the ARC.The etching process could include CFchemistry. The inner edges of the sloped ARC areasreduce the original photo-defined space since the underlying layers are now defined bythe sloped edges.
申请人：Roger W. Lindsay,Frances May,Robert Veltrop
地址：Boise ID US,Boise ID US,Eagle ID US
国籍：US,US,US
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