专利名称：Manufacturing method of diaphragm发明人：小林 智生,菅原 量申请号：JP2016230759申请日：20161129公开号：JP6797649B2公开日：20201209
摘要：PROBLEM TO BE SOLVED: To provide a diaphragm having no risk of gas leakageand having high durability, and a pressure sensor using the diaphragm.SOLUTION: Ametal diaphragm 101 comprises a flat plate-shaped pressure receiving part 101a and aframe-shaped support part 101b. The pressure receiving part 101a has a metal structuredeveloped in parallel with a flat plate surface having a flat plate shape.SELECTEDDRAWING: Figure 1
申请人：セイコーインスツル株式会社
地址：千葉県千葉市美浜区中瀬１丁目８番地
国籍：JP
代理人：内野 則彰,谷川 徹
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