专利名称:Liquid chemical dispensing apparatus发明人:de Leeuwe, Marc申请号:EP84105744申请日:19840519公开号:EP0127097A3公开日:19850109
专利附图:
摘要:Apparatus for dispensing liquid chemicals such as photoresist from containers(100, 2001, in particular from collapsible pouch-type containers.
申请人:UNION CARBIDE CORPORATION
代理人:Fuchs, Luderschmidt & Partner Patentanwälte
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