NARROW BAND EXCIMER LASER APPARATUS

专利名称：NARROW BAND EXCIMER LASER

APPARATUS

发明人：Hirotaka MIYAMOTO,Osamu WAKABAYASHI申请号：US15912633申请日：20180306

公开号：US20180198253A1公开日：20180712

专利附图：

摘要：A narrow band excimer laser apparatus includes a line narrowing module thatnarrows the spectral line width of laser light, a nitrogen gas introducing unit, a first valvethat restricts the flow of nitrogen gas from the introducing unit into a casing of the

module, an exhaust unit that causes gas to flow out from the casing, an exhaust pump forexhausting the gas from the casing, a second valve that restricts the exhausting of gasfrom the exhaust unit, an atmosphere discharge unit that discharges the gas within thecasing into the atmosphere, a third valve that restricts the discharge of gas into theatmosphere, and a control unit that closes the second valve while opening the first andthird valves, supplies nitrogen gas into the casing, then closes the third valve whileopening the first and second valves, drives the exhaust pump, and causes laser oscillationthereafter.

申请人：Gigaphoton Inc.

地址：Tochigi JP

国籍：JP

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