专利名称:APPARATUS FOR AND METHOD OF
FORMING PLURAL GROUPS OF LASERBEAMS USING TWO ROTATINGDIFFRACTIVE OPTICAL ELEMENTS
发明人:BRUNTON, Adam North,HENLEY, Simon
John
申请号:EP14711575.2申请日:20140313公开号:EP2976177A1公开日:20160127
摘要:An apparatus for and a method of forming a plurality of groups of laser beams(2, 2′, 2″) are defined. Each group (2, 2′, 2″) may comprise two or more laser beams. Theapparatus comprises a first diffractive optical element (3, referred as DOE) and a seconddiffractive optical element (8), the first DOE (3) being arranged to receive a first laserbeam (1) and to divide this into a plurality of second laser sub-beams and the secondDOE (8) being arranged to receive said plurality of second laser sub-beams and to divideeach of these into two or more groups of third laser sub-beams (2, 2′, 2″), the separationof the groups in a direction perpendicular to a first axis being adjustable by rotation ofthe first DOE (3) about its optical axis and the separation of the third laser sub-beams (2,2′, 2″) within each group in a direction perpendicular to the first axis being adjustable byrotation of the second DOE (8) about its optical axis.
申请人:M-Solv Ltd
地址:Oxonian Park Langford Locks Kidlington, Oxford OX5 1FP GB
国籍:GB
代理机构:Forsythe, Dominic
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