专利名称：Two-step electrode for MEMs micromirrors发明人：Yuan Ma,Mohiuddin Mala,John Michael
Miller
申请号：US10944840申请日：20040921公开号：US07110637B2公开日：20060919
专利附图：
摘要：A “piano”-style MEMs device includes an elongated platform pivotallymounted proximate the middle thereof by a torsional hinge. The middle portion of theplatform and the torsional hinge have a combined width less than the width of the rest of
the platform, whereby several of these “piano” MEMs devices can be positionedadjacent each other pivotally mounted about the same axis with only a relatively small airgap therebetween. In a preferred embodiment the range of angular motion of a MEMsdevice's platform is increased by reducing the field strength, i.e. the force per unit area,that is sensed at the outer free ends of the platform. Ideally two-step electrodes areprovided with a lower step positioned beneath the outer free end of the platform.
申请人：Yuan Ma,Mohiuddin Mala,John Michael Miller
地址：Nepean CA,Kanata CA,Aylmer CA
国籍：CA,CA,CA
代理机构：Teitelbaum & MacLean
代理人：Neil Teitelbaum,Doug MacLean
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