Integrated optics waveguide accelerometer with a p

专利名称：Integrated optics waveguide accelerometer

with a proof mass adapted to exert forceagainst the optical waveguide duringacceleration

发明人：Bruce Youmans,Victor Vali,Colleen

Fitzpatrick

申请号：US09/014111申请日：19980127公开号：US06018390A公开日：20000125

摘要：A sensor, an optical accelerometer, which is sensitive enough for the

measurement of nano-g's as well as thousands of g's. The sensor is created by an opticalwaveguide coil which is secured to a substrate. At one end of the waveguide coil, a mirrorreflects the emitting light back into the waveguide coil. Positioned along one side of thesubstrate, a proof mass is adapted to exert force against and deform the opticalwaveguide coil during acceleration of the sensor. An identical optical waveguide coil issecured to the opposing side of the substrate with its associated proof mass positionedon the side of the substrate opposite the other side's proof mass. A beamsplittercommunicates light into the ends of the two waveguide coils and then a monitor uses thelight being emitted from the ends of the coils to measure the g's being applied.

申请人：RICE SYSTEMS, INC.

代理机构：Price, Gess & Ubell

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